Resin Hose Manufacturer in Japan

Semiconductor

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Tube/Hose for Semiconductor

In the process of semiconductor and precision machine manufacturing, a resin hose is used for transporting chemicals such as cleaning liquid. HAKKO Flexible Fluorine (ETFE) Resin Hose Series can be used for small-space piping, thanks to their high chemical resistance and flexibility. Also, in the manufacturing process of Flat Panel Display (FPD), various chemicals such as solvents, iodine compounds, glass paste and UV curable adhesives are often used. HAKKO Flexible Fluorine (ETFE) Resin Hose Series can be used in these applications (Data Center, Inspection Device, Electrostatic Chuck and Cutting Device).

Adoption Examples

(A) Polishing Process

This process is to polish the surface of silicone wafer. In polishing, Fluorine tube (Teflon tube) is used to apply slurry-based chemicals.

(B) Resist Coating to Etching Process

When a circuit pattern on a wafer is produced, special photosensitive materials are used. This process is divided into four stages: photoresist coating, exposure, development and etching. Photoresist coating is the application of resist to wafer. The exposure process is photosensitive resist with light passed along circuit pattern. The development stage is to remove the photosensitive resist with special liquid (developer). The etching process is to remove the oxide film before resist coating. A fluorine tube (Teflon tube) is usually used for getting rid of the oxide film (Resist Coating Pre-Treatment). In the resist process, polyvinyl alcohol, cinnamic acid chloride and naphthoquinone azide are frequently used chemicals. In the development process, aqueous solution of tetramethylammonium hydroxide, xylene and acetate are frequently used chemicals. In the etching process, phosphpric acide (aluminum), ferric chloride (copper), hydrofluoric acid and acetone are frequently used chemicals.

(C) Cleaning Process

In order to remove any contaminations such as wastes and metal ions on the surface of wafer, fluids such as high-purity acid, alkali-based chemicals (such as ammonia, hydrogen peroxide, hydrochloric acid and hydrogen peroxide) and pure water are used. A fluorine tube (Teflon tube) is used for transporting these fluids.

Current Problem: Teflon hose is hard to bend.

Situations: Company A, which has been designing flat panel display, transports solvents and iodine compounds. However, teflon hose with an inner diameter of 25mm is hard to bend. Company A decided to use a corrugated teflon hose, but the fluid accumulation inside a hose has become a problem.

Solutions: Flexible Fluorine (ETFE) Resin SUS Spring Wire Hose [E-SJSP]

HAKKO CORPORATION recommends E-SJSP, which has a high chemical resistance. Also, due to the stainless steel wire inside the hose, E-SJSP is less likely to be bent. Company A has decided to adopt E-SJSP.

panel01
E-SJSP-25: Minimum Bend Radius: 100mm

Major Product List

Flexible Fluorine (ETFE) Resin Tubing Clear [Model Number: E-SJ]

image-E-SJ-mm01

E-SJ-mm

Solvent Resistance
Non-PVC
Non-Adhesiveness
Chemical Resistance
Low Elution
Low Odor
Food-Sanitation
Flexibility
Transparency
Oil-Proof
Cold Resistance
Alcohol Resistance

Inner Diameter : 2 - 8mm

Flexible Fluorine (ETFE) Resin Yarn Reinforced Hose [Model Number: E-SJB]

image-E-SJB01

E-SJB

Solvent Resistance
Non-PVC
Non-Adhesiveness
Chemical Resistance
Low Elution
Low Odor
Food-Sanitation
Pressure-Proof
Transparency
Oil-Proof
Cold Resistance
Alcohol Resistance

Inner Diameter : 9 - 38mm

Flexible Fluorine (ETFE) Resin SUS Spring Wire Hose [Model Number: E-SJSP]

image-E-SJSP01

E-SJSP

Solvent Resistance
Non-PVC
Non-Adhesiveness
Chemical Resistance
Low Elution
Low Odor
Food-Sanitation
Vacuum
Transparency
Oil-Proof
Hard to Break
Cold Resistance
Alcohol Resistance

Inner Diameter : 12 - 38mm

Flexible Fluorine (ETFE) Resin Tubing (Dissipative Type) [Model Number: E-SJD]

image-E-SJD01

E-SJD

Conductive
Solvent Resistance
Non-PVC
Non-Adhesiveness
Chemical Resistance
Low Odor
Food-Sanitation
UV Cut
Oil-Proof
Alcohol Resistance
UL Compliant

Inner Diameter : 6 - 8mm

Flexible Fluorine (ETFE) Resin SUS Spring Wire Hose (Dissipative Type) [Model Number: E-SJSD]

image-E-SJSD01

E-SJSD

Conductive
Solvent Resistance
Non-PVC
Non-Adhesiveness
Chemical Resistance
Low Odor
Food-Sanitation
UV Cut
Vacuum
Oil-Proof
Hard to Break
Alcohol Resistance
UL Compliant

Inner Diameter : 12 - 25mm

Made-to-Order Product

Flexible Fluorine (ETFE) Resin Tubing Anti-Static Type [Model Number: E-SJ-AST]

image-E-SJ-AST01

E-SJ-AST

Solvent Resistance
Non-PVC
Non-Adhesiveness
Chemical Resistance
Low Elution
Flexibility
Washability
Transparency
Oil-Proof
Prevention of Static Charge

Inner Diameter :

Anti-Static Polyurethane Tubing [Model Number: E-ASPU]

image-E-ASPU01

E-ASPU

Non-PVC
Flexibility
Prevention of Static Charge
RoHS 2 Free

Inner Diameter :

NEWS

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